Education
Master in Micro and Nanosystems
- Microsystems I: Process Technology and Integration
- Microsystems II: Devices and Applications
- Multiphysics Modeling and Simulation
- Embedded MEMS Lab
- Seminar on Micro and Nanosystems
Master in Mechanical Engineering
Specialization in Micro & Nanosystems
- Microsystems I: Process Technology and Integration
- Microsystems II: Devices and Applications
- Multiphysics Modeling and Simulation
- Embedded MEMS Lab
- Seminar on Micro and Nanosystems
Bachelor in Mechanical Engineering
Focus on Microsystems and Nanoscale Engineering, and Biomedical Engineering
- Microsystems I: Process Technology and Integration
- Studies on Micro and Nanosystems