Nanotransducers and Nanosystems

Integrated Micro and Nano Electro Mechanical Systems (MEMS and NEMS)

Advanced Microsystems

Development of thermo electric generators and polymer-based micro sensors

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I would like to kindly invite you to the next Micro and Nanosystems seminar of this semester. A presentation will be given by Seoho Jung at 13:30, followed by the MSc defense of Fabien Dorey at 14:30 (please note that the Zoom links are different).

Date: 11.03.2022
Time: 13:30 / 14.30
Location: hybrid G2 (limited seats) - Zoom

Title: High-speed pick-and-place production of ultraclean carbon nanotube transistors
Speaker: Seoho Jung

Abstract: Nanotransistors with ultraclean carbon nanotubes (CNTs) have shown astonishing properties as ultra-low-power sensors and high-quality quantum devices. However, the lack of an industrial fabrication process remains as the biggest barrier against the commercialization of these devices. Large-scale nanotube integration methods reported so far allow neither preselection of nanotube nor control of the number of nanotubes on each device. A pick-and-place production method based on nanotube preselection with Raman spectroscopy and serial dry transfers is a promising alternative but can only produce only up to two devices per hour. This Friday Talk presents a high-speed, pick-and-place fabrication process of ultraclean carbon nanotube transistors, which we have developed with project partners at ETH, Empa, and EPFL. With significantly accelerated or scaled-up unit processes—nanotube growth, selection, and assembly—our process flow demonstrates a throughput that is 100 times higher than the state of the art.

Title: Freestanding, perforated graphene for nanoparticles transfer studies
Speaker: Fabien Dorey

During the development stages of new drugs, it is necessary to study their transfer mechanisms through dif-ferent biological membranes such as the placenta. To do that efficiently, human-relevant in vitro models have been developed. They consist of two cell layers separated by a supportive, few micrometer thick porous membrane. Unfortunately, these models fail to represent nanoparticles transfer mechanism. In order to im-prove and adapt these models, a new type of membrane is proposed using graphene. Graphene was sus-pended over a large metallic grid with a coverage close to 100%. A new perforation method for suspended graphene was then developed to allow cell to cell communication through the supportive layer. The gra-phene membranes were then analyzed in terms of cell viability and the results confirmed their potential to replace state-of-the-art membranes and finally enable quantitative in vitro transfer studies.

Seminar information:

- Due to room occupancy, the talks will be held hybrid in G2 (limited seats) and on ZOOM until further notice.
- The talks take roughly 25 minutes followed by a Q&A session.
- For everyone that is not in the Micro and Nanosystems group: Please note that in order to join remotely the seminar, it is mandatory to register on zoom with your full name and have the camera turned on. This is purely for identification purposes since in-depth content of the projects is shared during the talks. ZOOM and other type of recordings are not allowed.
- If you want to be deregistered from the invitations, please send me an email.

We look forward to your participation!

More upcoming events will be published soon

01.04.2022 Dr. Haluska, Raman spectroscopy on nanostructured carbon materials
08.04.2022 Katrina Klösel, Sense-log devices: recent advances in integration
                     Signe Lin Vehusheia, Analysis of in vitro heat flux measurement of E. Coli bacteria for potential infection detection on        implant surfaces
22.04.2022 Lucrezia Maini, Experimental characterization and simulation of a passive acoustic strain sensor
                    Dr. Genovés Gomez tbd
29.04.2022 Johannes Weichart, Development of a sensitive artificial fingertip – from microsensor networks to soft material integration
06.05.2022 Morten Vollmannm Understanding the phase of intermixing currents in CNT resonators
20.05.2022 Christina Gentili, Measurement Setup for a CNT Gas sensor Array
                     Dr. Kishan Thodkar, Towards dry transfer assisted CVD graphene/hBN heterostructure devices & applications

Findmore MNS Events here

MNS News

01.05.2021
Wecome to Cristina Gentili who will start her PhD project in May in the Micro-Nanosystems Group.

01.05.2021
We welcome Maximilian Aue as a Doctoral Student in the Micro-Nanosystems Group very soon.

01.04.2021

Please join us to welcome Dr. Mathis Trant, Francesco Scipione and Samuele Demicheli to the MNS group. It is a great pleasure to have our new group members on board to pursue the Innosuisse Project with microGauge. We wish you an excellent start and a lot of success for your new challenge.

01.05.2020
Kishan Thodkar started as a post doc in our group. Please join me welcoming Kishan and wish him a good start!

01.02.2020
Lucrezia Maini started her PhD project in our group. Please join me welcoming Lucrezia and wish her a great start!

28.10.2019
Prof. Christofer Hierold is keynote speaker at IEEE Sensors 2019 in Montreal, Canada titled "Concepts for Ultra Low Power Sensors"

23.-27.06.2019
Transducers & Eurosensors 2019 - The 20th International Conference on Solid-State Senors, Actuators and Microsystems takes place in Berlin - General Chair: Christofer Hierold - ETH Zürich, Switzerland Program Chair: Jürgen Brugger - EPFL, Switzerland

03.06.2019
Please welcome Morten Vollmann as new PhD student in the group. He will continue working on strainable CNT resonators.

27.05.2019
Laura Jenni successfully defended her PhD thesis titled "Optimization of Dry-Transferred CNTFET Contacts by Post-Transfer Processing". Congratulations!

13.05.2019
Sebastian Eberle successfully defended his PhD thesis titled "Ultra-clean suspended carbon nanotube gas sensors - concept for large scale fabrication and sensor characterization". Congratulations!

29.04.2019
Lalit Kumar successfully defended his PhD thesis titled "Energy Dissipation, Clamping and Motional Currents in Suspended Room Temperature Carbon Nanotube Resonators". Congratulations!

01.04.2019
Signe Lin Vehusheia started her PhD project in our group on implantable sensors. Please join me welcoming Signe Lin and wish her a good start!

04.03.2019
Please welcome Prof. Wang Xiaohong, Tsinghua University Beijing in our group. Prof. Wang is on sabbatical leave for six months at ETH Zürich. A warm welcome from all of us!

01.03.2019 Johannes Weichart will start a PhD project on dynamic tactile sensors in our group. Please join me welcoming Johannes and wish him an excellent start.

07.01.2019 Kanata Tanaka, a visiting student from Prof. Sawada’s group at Toyohashi University of Technology, started working with Stefan Nedelcu. Please join me welcoming Kanata and wish him a good start!

01.01.2019
Matthias Dupuch has decided to start his PhD with his project in our group. Please welcome Matthias and wish a good start!

01.01.2019 Katrina Klösel started her PhD project in our group on new TEG materials. Please join me welcoming Katrina and wish her a good start!

16.10.2018
Silvan Marc Staufert successfully defended his PhD thesis titled "Conformal Papylene-C Media Separating Membranes for Pressure Sensing Applications in Verticular Assist Devices". Congratulations!

23.05.2018 Michelle Müller successfully defended her PhD thesis titled "Micromechanical broadband vibration amplitude-amplifier for microseismic and acoustic emission detection". Congratulations!

02.05.2018 Verena Maiwald successfully defended her PhD thesis titled "A Microelectromechanical Switch for Bandpass Vibration Detection". Congratulations!

18.04.2018
Moritz Thielen successfully defended his PhD thesis titled "Thermal and Electrical Energy Converters and Interfaces for the Internet of Humans". Congratulations!

08.03.2018 Seoho Jung will start a new PhD thesis towards automated assembly of carbon nanotubes at MNS. Please join me welcoming Seoho and wish him a good start.

01.03.2018
We welcome Dr. Ali Özhan Altun as a post doc and pioneer fellow in our team. Please join in welcoming Ali and wish him all the best!

15.01.2018 "Learning from grasshoppers" Researchers at ETH Zurich have developed a new type of health-monitoring electrode that exhibits optimum adhesion to skin and can record high quality signals. Read more here!

14.01.2018
ETH has developed new electrodes (watch: SRF Tagesschau)

13.01.2018 The paper "Skin Conformal Polymer Electrodes for Clinical ECG and EEG Recordings" by M. Thielen, C. Peters, C Hierold et al. is online on Wiley Online Library!

27.11.2017
The paper "Degradable Magnetic Composites for Minimally Invasive Interventions: Device Fabrication, Targeted Drug Delivery and Cytotoxicity Tests" by Christian Peters, Salvador Pané et al. is featured on NanoScribe’s website. Congratulations!

23.10.2017
"An inspiring partnership" ETH Zurich and IBM Research opened the Binning and Rohrer Nanotechnology Center some six years ago. Check it out here!

01.10.2017
We welcome Cancan Blaser as a post doc in our team and wish her an excellent start at MNS.

07.07.2017
Dr. Christian Peters receives the Prix Omega 2017 for his PhD Thesis “Biodegradable Superparamagnetic Polymer Composites: From Material Identification to Device Application.” The annual prize is awarded for the outstanding PhD work in Switzerland, considering applications from the fields of microengineering, micro- and nanotechnology, solid-state physics and electronics, as well as chronometry throughout all universities in Switzerland.

”Congratulations!

18.09.2016
"The microdoctors in our bodies" is featured in the ETH Globe magazine! Check it out here!

02.05.2016
Ian Mihailovic will start a new PhD thesis towards nanostructured materials for TEGs and fabrication technology. Please join in welcoming Ian!

01.04.2016
We welcome Ms. Manuela Kägi as a Team Assistant and thank her in advance for future support!

28.01.2016
Prof. Henry Baltes receives the 2016 IEEE Robert Bosch Micro and Nano Electro Mechanical Systems Award "for contributions to the exploration and development of CMOS-MEMS, to production using IC foundries and MEMS post-processing, and for inspirational leadership in the worldwide MEMS community" !