Research

Turning Properties into Functions

In our group research projects are focused on the exploration of new methods and processes for the utilization of material properties for functional devices and future products. This incorporates research on new materials for novel devices, on modelling and simulation of device characteristics and on reproducible fabrication processes for system integration and innovations.

Carbon Nanotube-based Electromechanical Resonator for Force and Mass Sensing. Ultra-low Power Carbon Nanotube-based Gas Sensor for NO2 Sensing. Ultraclean Carbon Nanotube Field-effect Transistor. An artificial skin equiped with tactile sensor arrays Flexible Bi ₂Te ₃ Thermoelectric Generator. SEM Close-up of a Bi ₂Te ₃ Thermopile. SU-8 Spring Structures for MEMS Gyroscope. Stator and Rotor of a MEMS Flywheel Gyroscope. Vertical Comb Drive Actuator for Phase Shifter Applications.

Two Main Lines of Research:

(1) Nanotransducers and Nanosystems

The objectives of the research on nanotransducers and nanosytems are the exploration of novel growth processes and the evaluation of electronic, mechanical and electromechanical properties of single-walled carbon nanotubes as active elements in electromechanical transducers. Integrated Nano Electro-Mechanical Systems (NEMS) are proposed, which will be used to study the properties of nanotransducers, which are preferably integrated into MEMS, for sensing applications.

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(2) Advanced Microsystems

In advanced microsystems, research topics include the development of new low-cost polymer-based biocompatible and biodegradable strain sensors, magnetic polymer microsystems for biomedical applications, the development of micro thermoelectric generators to provide power to autonomous micro systems without the use of batteries, and the development of micromechanical electrostatic bearings for use in MEMS gyroscopes.

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